In this article, we present classification of integrated optical MEMS devices as being free-space or guided-wave based on light propagation method. Free-space optical MEMS devices are limited in performance by precision of micromachining and alignment of optical components. To fully leverage the capacity of the free-space devices, integration of photonic or electronic signal processing on chip is a relevant and ongoing research work. Guided-wave optical MEMS devices where all optical, electrical and mechanical components are integrated are more reliable and have lower costs. Grating coupler based free-space optical MEMS accelerometer with potential for integration of detection circuit is discussed. Waveguide Bragg grating based guided-wave optical MEMS widely tunable filters with potential for integration of electronic channel selectivity circuit to improve the device performance is also presented. Waveguide Bragg gratings based guided-wave optical MEMS accelerometers with potential for integration of optical spectral detection using unbalanced Mach–Zehnder modulators on chip is also discussed in this work. In the conclusion, we argue for development of integrated electronic or photonic integrated devices for both classes of optical MEMS devices to enhance their functionality and improve performance.

在本文中，我们将基于光传播方法的集成光学 MEMS 器件分类为自由空间或导波。自由空间光学 MEMS 器件的性能受到微加工精度和光学元件对准的限制。为了充分利用自由空间设备的能力，在芯片上集成光子或电子信号处理是一项相关且正在进行的研究工作。集成所有光学、电气和机械组件的导波光学 MEMS 器件更可靠且成本更低。讨论了基于光栅耦合器的具有集成检测电路潜力的自由空间光学 MEMS 加速度计。还介绍了基于波导布拉格光栅的导波光学 MEMS 广泛可调滤波器，该滤波器具有集成电子通道选择电路以提高器件性能的潜力。在这项工作中还讨论了基于波导布拉格光栅的导波光学 MEMS 加速度计，该加速度计具有使用片上不平衡 Mach-Zehnder 调制器集成光谱检测的潜力。总之，我们主张为两类光学 MEMS 器件开发集成电子或光子集成器件，以增强其功能并提高性能。在这项工作中还讨论了基于波导布拉格光栅的导波光学 MEMS 加速度计，该加速度计具有使用片上不平衡 Mach-Zehnder 调制器集成光谱检测的潜力。总之，我们主张为两类光学 MEMS 器件开发集成电子或光子集成器件，以增强其功能并提高性能。在这项工作中还讨论了基于波导布拉格光栅的导波光学 MEMS 加速度计，该加速度计具有使用片上不平衡 Mach-Zehnder 调制器集成光谱检测的潜力。总之，我们主张为两类光学 MEMS 器件开发集成电子或光子集成器件，以增强其功能并提高性能。