To explore the forming process and mechanism of the surface texture of laser micropits, this paper presents the thermal model of laser machining based on the Neumann boundary conditions and an investigation on the effects of various parameters on the processing. The surface profile and quality of the formed micropits were analyzed using NanoFocus 3D equipment through a design of experiment (DOE). The results showed that more intense melting and splashing occurred with higher power density and narrower pulse widths. Moreover, the compressive stress is an important indicator of the damage effects, and the circumferential thermal stress is the primary factor influencing the diameter expansion. During the process of laser machining, not only did oxides such as CuO and ZnO generate, the energy distribution also tended to decrease gradually from region #1 to region #3 based on an energy dispersive spectrometer (EDS) analysis. The factors significantly affecting the surface quality of the micropit surface texture are the energy and pulse width. The relationship between taper angle and energy is appropriately linear. Research on the formation process and mechanism of the surface texture of laser micropits provides important guidance for precision machining.

为探讨激光微坑表面织构的形成过程和机理，本文提出了基于诺依曼边界条件的激光加工热模型，并研究了各种参数对加工的影响。使用 NanoFocus 3D 设备通过实验设计 (DOE) 分析形成的微坑的表面轮廓和质量。结果表明，更高的功率密度和更窄的脉冲宽度会发生更强烈的熔化和飞溅。此外，压应力是损伤效应的重要指标，周向热应力是影响扩径的主要因素。在激光加工过程中，不仅生成了CuO、ZnO等氧化物，根据能谱仪 (EDS) 分析，能量分布也趋于从区域 #1 到区域 #3 逐渐降低。显着影响微坑表面纹理表面质量的因素是能量和脉冲宽度。锥角和能量之间的关系是适当的线性关系。研究激光微坑表面织构的形成过程和机理，为精密加工提供重要指导。