Abstract

The thermal properties of individual precursors, zirconium(IV) and yttrium(III) dipivaloylmethanates, and of their mixtures [Zr(thd)₄–Y(thd)₃, Hthd = 2,2,6,6-tetramethylheptane-3,5-dione] used for preparing mixed oxide films by chemical vapor deposition were studied in the condensed and gas phases. In the condensed phase, the vaporization rate of both individual compounds and their mixtures considerably exceeds the decomposition rate. The vaporization, thermal stability of the vapors, and thermal decomposition of the compounds in a vacuum and in the presence of oxygen were studied using mass-spectrometric monitoring of the gas phase composition. Comparison of the thermal behavior of individual Zr(thd)₄ and Y(thd)₃, heated in separate vaporizers of the mass spectrometer inlet system, and of their mixtures with different Zr(thd)₄ to Y(thd)₃ ratios reveals no chemical interaction between the precursors in the examined temperature interval.

中文翻译：

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锆 (IV) 和钇 (III) 二新戊酰甲酸酯混合物的热行为

摘要

单个前体、二戊酰基甲烷酸锆 (IV) 和钇 (III) 及其混合物的热性能 [Zr(thd) ₄ –Y(thd) ₃ , Hthd = 2,2,6,6-四甲基庚烷-3,5 -dione] 用于通过化学气相沉积制备混合氧化物薄膜在冷凝和气相中进行了研究。在冷凝相中，单个化合物及其混合物的蒸发速率大大超过分解速率。使用气相组成的质谱监测来研究化合物在真空和氧气存在下的蒸发、蒸汽的热稳定性和热分解。单个 Zr(thd) ₄和 Y(thd) ₃的热行为比较，在质谱仪入口系统的单独蒸发器中加热，以及它们具有不同 Zr(thd) ₄与 Y(thd) ₃比率的混合物显示在检查的温度区间内前体之间没有化学相互作用。