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Characterization of laser beams: theory and application in laser-assisted bonding process
Optical Engineering ( IF 1.1 ) Pub Date : 2021-06-01 , DOI: 10.1117/1.oe.60.6.060801
Wagno Alves Braganca 1 , KyungOe Kim 1
Affiliation  

The International Organization for Standardization (ISO), in collaboration with the academic community, has developed and published a comprehensive system of standards for the characterization of optical components and laser beams. Our study offers a pedagogical introduction to the theory and application of laser beam characterization in accordance with ISO 13694:2018 and ISO 11145:2018. The characterizing parameters of each ISO standard are presented, defined mathematically, and explained in detail through the use of a minimum working example. A laser beam applied to an actual industrial process [laser-assisted bonding (LAB) process in the semiconductor packaging industry] is thoroughly analyzed to help the reader understand and interpret the characterizing results. Background noise correction and unit conversion methods are also discussed. We target researchers new to the field of laser beam analysis who want the acquire background knowledge, as well as more experienced researchers who want to implement their own laser beam analysis software and propose new definitions for their specific application. Although our study deals with only two ISO standards, the methods covered in our study can be easily applied to other norms that fit the reader’s application. Our study should not be treated as a full review of the LAB process nor of the beam profiling instruments and measurement principles. These are only mentioned to enhance the reader’s learning experience.

中文翻译:

激光束表征:激光辅助键合工艺的理论与应用

国际标准化组织 (ISO) 与学术界合作,开发并发布了一套用于表征光学元件和激光束的综合标准系统。我们的研究根据 ISO 13694:2018 和 ISO 11145:2018 对激光束表征的理论和应用进行了教学介绍。每个 ISO 标准的特征参数都被呈现出来,以数学方式定义,并通过使用最少的工作示例进行详细解释。对应用于实际工业过程 [半导体封装行业中的激光辅助键合 (LAB) 过程] 的激光束进行了彻底分析,以帮助读者理解和解释表征结果。还讨论了背景噪声校正和单位转换方法。我们的目标是希望获得背景知识的激光束分析领域的新研究人员,以及希望实施自己的激光束分析软件并为其特定应用提出新定义的更有经验的研究人员。尽管我们的研究仅涉及两个 ISO 标准,但我们研究中涵盖的方法可以轻松应用于适合读者应用的其他规范。我们的研究不应被视为对 LAB 过程、光束分析仪器和测量原理的全面审查。提及这些只是为了增强读者的学习体验。以及想要实施自己的激光束分析软件并为其特定应用提出新定义的更有经验的研究人员。尽管我们的研究仅涉及两个 ISO 标准,但我们研究中涵盖的方法可以轻松应用于适合读者应用的其他规范。我们的研究不应被视为对 LAB 过程、光束分析仪器和测量原理的全面审查。提及这些只是为了增强读者的学习体验。以及想要实施自己的激光束分析软件并为其特定应用提出新定义的更有经验的研究人员。尽管我们的研究仅涉及两个 ISO 标准,但我们研究中涵盖的方法可以轻松应用于适合读者应用的其他规范。我们的研究不应被视为对 LAB 过程、光束分析仪器和测量原理的全面审查。提及这些只是为了增强读者的学习体验。
更新日期:2021-06-18
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