In view of the problem that the increased difficulty of underwater moving targets detection caused by the development of acoustic stealth technology, a beaded cilia MEMS vector hydrophone (BCVH) is proposed in this paper. Compared with previous cilia structures, it can enlarge the receiving area of acoustic wave to improve sensitivity without the introduction of additional structures. Meanwhile, the introduction of additional mass and the loss of working frequency band are reduced, and the structure is manufactured at one time. In this paper, the design scheme and optimal size of BCVH are determined via theoretical analysis and simulation, then vector hydrophone calibration system is used to verify it. The experimental results show that the sensitivity of BCVH reaches −183.3 dB (@1kHz, $0\mathrm{d}\mathrm{B}=1\mathrm{V}/\mu \mathrm{P}\mathrm{a}$), 13.7 dB higher than bionic cilia MEMS vector hydrophone (CVH). Moreover, the depth of concave point of BCVH is more than 30 dB, which has a good directivity.

针对声隐身技术的发展导致水下运动目标检测难度增加的问题，本文提出了一种串珠纤毛MEMS矢量水听器（BCVH）。与以前的纤毛结构相比，它可以在不引入额外结构的情况下，扩大声波的接收面积，提高灵敏度。同时，减少了附加质量的引入和工作频段的损失，并且结构是一次性制造的。本文通过理论分析和仿真确定了BCVH的设计方案和最佳尺寸，然后利用矢量水听器标定系统对其进行了验证。实验结果表明BCVH的灵敏度达到-183.3 dB (@1kHz,$0\mathrm{d}\mathrm{乙}=1\mathrm{伏}/\mu \mathrm{磷}\mathrm{一种}$)，比仿生纤毛 MEMS 矢量水听器 (CVH) 高 13.7 dB。而且BCVH的凹点深度大于30dB，具有良好的指向性。