To meet the increasing needs of high-precision glass micro-optics and address the major limitations of current three-dimensional (3D) printing optics, we have developed a liquid, solvent-free, silica precursor and two-photon 3D printing process. The printed optical elements can be fully converted to transparent inorganic glass at temperatures as low as 600 C with a shrinkage rate of 17%. We have demonstrated the whole process, from material development, printing, and performance evaluation of the printed glass micro-optics. 3D printing of glass micro-optics with isotropic shrinkage, micrometer resolution, low peak-to-valley deviation (${\lt}100\;\rm nm$), and low surface roughness (${\lt}6\;\rm nm$) has been achieved. The reported technique will enable the rapid prototyping of complex glass micro-optics previously impossible using conventional glass optics fabrication processes.

中文翻译：

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玻璃微光学的三维打印

为了满足高精度玻璃微光学器件日益增长的需求并解决当前三维 (3D) 打印光学器件的主要局限性，我们开发了一种液体、无溶剂、二氧化硅前驱体和双光子 3D 打印工艺。印刷的光学元件可在低至 600°C 的温度下完全转化为透明无机玻璃，收缩率为 17%。我们展示了从材料开发、印刷到印刷玻璃微光学元件性能评估的整个过程。具有各向同性收缩、微米分辨率、低峰谷偏差 ( ${\lt}100\;\rm nm$ ) 和低表面粗糙度 ( ${\lt}6\;\ )的玻璃微光学元件的 3D 打印rm 纳米$) 已达到。所报告的技术将使以前使用传统玻璃光学制造工艺无法实现的复杂玻璃微光学元件的快速原型制作成为可能。