The microstructure, mechanical and micro/nano-tribological properties of the 60NiTi film annealed at different temperature were investigated. The results reveal that annealing as-deposited 60NiTi film at 300, 375, and 600 °C for 1 h leads to structural relaxation, partial crystallization and full crystallization, respectively. Compared with the structurally relaxed structure, the partially crystallized structure exhibits increased hardness but decreased elastic modulus. This is because that the elastic modulus is reduced by Voigt model while the hardness is improved by composite effect. Due to the highest hardness and ratio of hardness to elastic modulus (H/E), the partially crystallized 60NiTi film has the lowest penetration depth and residual depth (i.e., groove depth). Besides, the results also reveal that ductile plowing is the dominant wear mechanism for all the annealed 60NiTi films. Under the condition of the ductile plowing, coefficient of friction and wear resistance are related to penetration depth and residual depth, respectively. Therefore, the partially crystallized 60NiTi film shows the best tribological performance at the micro/nano-scale. The current work not only highlights the important roles of hardness and H/E in improving the micro/nano-tribological properties but also concludes an efficient and simple method for simultaneously increasing hardness and H/E.

研究了不同温度退火的60NiTi薄膜的显微组织、力学性能和微/纳米摩擦学性能。结果表明，将沉积的 60NiTi 薄膜在 300、375 和 600°C 下退火 1 小时分别导致结构松弛、部分结晶和完全结晶。与结构松弛的结构相比，部分结晶的结构硬度增加但弹性模量降低。这是因为 Voigt 模型降低了弹性模量，而复合效应提高了硬度。由于最高的硬度和硬度与弹性模量的比值 ( H/E)，部分结晶的 60NiTi 薄膜具有最低的穿透深度和残留深度（即凹槽深度）。此外，结果还表明，韧性犁削是所有退火 60NiTi 薄膜的主要磨损机制。在韧性耕作条件下，摩擦系数和耐磨性分别与穿透深度和剩余深度有关。因此，部分结晶的 60NiTi 薄膜在微/纳米尺度上表现出最好的摩擦学性能。目前的工作不仅突出了硬度和H/E在改善微/纳米摩擦学性能方面的重要作用，而且还得出了一种同时提高硬度和H/E的有效且简单的方法。