Compliant finishing (e.g. shape adaptive grinding) can routinely achieve nanoscale roughness on diverse metal and ceramic materials. However, when processing multiphase materials consisting of distinct phases with different mechanical properties, non-uniform material removal often occurs and the inherent mechanism remains unclear. Here, a deterministic and stochastic model to predict processed surface topography is derived from the different material removal behaviours across phases. Experimental topographies, profiles and roughness on three selected Si-SiC samples show high consistency with theoretical predictions. Both model and experiments indicate that improved and stable surface finish can be achieved on metal matrix composites with small grain size.

合规精加工（例如形状自适应研磨）通常可以在各种金属和陶瓷材料上实现纳米级粗糙度。然而，当处理由具有不同机械性能的不同相组成的多相材料时，经常会出现不均匀的材料去除，并且其内在机制尚不清楚。在这里，用于预测加工表面形貌的确定性和随机模型源自不同阶段的不同材料去除行为。三个选定的 Si-SiC 样品的实验形貌、轮廓和粗糙度显示出与理论预测的高度一致性。模型和实验都表明，可以在小晶粒尺寸的金属基复合材料上实现改进和稳定的表面光洁度。