Abstract The characterization of surface micro-roughness is investigated by using off-specular measurements of polarized optical scattering. In the measurement system, the detection angles of optical scattering are defined by the vertical and level scattering angles. The rotating mechanism of angles is controlled by stepper motors. Waveplate and polarizer are used to adjust light polarization and detection. We conduct the optical scattering measurements by using four standard metal sheets of surface roughness. The nominal values (Ra) of standard micro-roughness are 1.6 μm, 0.8 μm, 0.4 μm, and 0.1 μm, respectively. Samples with different surface roughness are evaluated with the utilization of laser sources at three incident wavelengths. These polarized images are analyzed using a computer program to obtain the distribution of light intensity. The results show great correlation between the metal surface roughness and polarization states. This measurement system can be used to quickly and accurately distinguish between different surfaces and properties.

中文翻译：

---

通过偏振光散射的非镜面测量表征表面微粗糙度

摘要 利用偏振光散射的非镜面测量研究了表面微观粗糙度的表征。在测量系统中，光学散射的检测角由垂直散射角和水平散射角定义。角度旋转机构由步进电机控制。波片和偏振器用于调整光的偏振和检测。我们使用四个表面粗糙度的标准金属片进行光学散射测量。标准显微粗糙度的标称值 (Ra) 分别为 1.6 μm、0.8 μm、0.4 μm 和 0.1 μm。使用三种入射波长的激光源评估具有不同表面粗糙度的样品。使用计算机程序分析这些偏振图像以获得光强度分布。结果表明金属表面粗糙度和极化状态之间有很大的相关性。该测量系统可用于快速准确地区分不同的表面和属性。