This paper is a report on the design and fabrication of a dual-axis micro-opto-electro-mechanical system (MOEMS) accelerometer. The device consists of a proof mass (PM) suspended by four L-shaped springs. Two Fabry-Pérot (FP) cavities are formed between the cross-sections of the PM and the ends of two cleaved optical fibers in perpendicular directions (the X and Y axes). The acceleration causes the proof mass to move in the reverse direction relative to the applied acceleration. The sensor is fabricated by a silicon-on-insulator wafer. The fabricated sensor is characterized both by spectral monitoring and power measurements in the range of ±1 g. The results of spectral measurements show 3.23 nm/g (g = 9.81 m/s2: gravity constant) and 3.19 nm/g to the applied acceleration along the X and Y axes, respectively. Moreover, the obtained resolutions for the two directions of X and Y are $309~\mu \text{g}$ and $313~\mu \text{g}$ , respectively. Besides, the sensitivity of the sensor in power measurements is 550 mV/g and 528 mV/g in the X and Y directions, respectively. The sensor also possesses the resonant frequencies of 1382.5 Hz and 1398.6 Hz in the X and Y axes, respectively, in the range of ±1 g. The maximum cross-axis sensitivities obtained for this sensor are below 0.19% for each pair of X, Y, and Z axes. This value is fewer than the cross-axis sensitivity of most micro electro-mechanical systems without any post processing. This small value is a result of insensitivity of the FP spectrum to the lateral displacements of the PM.

中文翻译：

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双轴 MOEMS 加速度计

本文是关于双轴微光机电系统 (MOEMS) 加速度计的设计和制造的报告。该设备由一个由四个 L 形弹簧悬挂的检测质量 (PM) 组成。两个法布里-珀罗 (FP) 腔形成在 PM 的横截面和垂直方向（X 轴和 Y 轴）上的两条切割光纤的端部之间。加速度导致检测质量相对于施加的加速度沿相反方向移动。该传感器由绝缘体上硅晶片制造。制造的传感器的特征在于±1 g范围内的光谱监测和功率测量。光谱测量结果显示，沿 X 轴和 Y 轴施加的加速度分别为 3.23 nm/g（g = 9.81 m/s2：重力常数）和 3.19 nm/g。而且， $309~\mu \text{g}$ 和 $313~\mu \text{g}$ ， 分别。此外，传感器在功率测量中的灵敏度在 X 和 Y 方向分别为 550 mV/g 和 528 mV/g。该传感器还在 X 和 Y 轴上分别具有 1382.5 Hz 和 1398.6 Hz 的谐振频率，范围为 ±1 g。对于每对 X、Y 和 Z 轴，该传感器获得的最大交叉轴灵敏度低于 0.19%。该值低于大多数没有任何后处理的微机电系统的交叉轴灵敏度。这个小值是 FP 谱对 PM 的横向位移不敏感的结果。