The present work proposes an optical polarization based reflection technique for determining surface roughness of metal surfaces. A linearly polarized light beam is used to illuminate the sample surface and two intensity data frames are recorded with specific orientations of an analyzer. An algorithm is developed to combine the pair of intensity data frames captured with this simple setup. Assuming that the refractive index of the sample is known and constant throughout the sample, the phase difference between the transverse electric and transverse magnetic components of the light reflected from the surface preserve the information about surface roughness in terms of local angular tilts, which is subsequently converted to axial deviations about the nominal surface.

目前的工作提出了一种基于光偏振的反射技术，用于确定金属表面的表面粗糙度。使用线性偏振光束照射样品表面，并使用分析仪的特定方向记录两个强度数据帧。开发了一种算法来结合使用这种简单设置捕获的一对强度数据帧。假设样品的折射率是已知的并且在整个样品中是恒定的，从表面反射的光的横向电和横向磁分量之间的相位差保留了关于局部角倾斜的表面粗糙度信息，随后转换为关于公称表面的轴向偏差。