Grating plays an important role in many fields, so it is of great significance to develop a low-cost and rapid grating fabricating technology. In this paper, the stretching deformation process of PDMS is firstly studied by the COMSOL finite element simulation, and the simulation result proves theoretically that the line-density of PDMS grating could be effectively increased by stretching. Then, we propose a novel method to increase the line-density of grating based on PDMS stretching and PUA replication. The relationship between the elongation and uniform region, line-density increase ratio, groove depth reduction is discussed. The experimental results are consistent with the simulation result. The grating diffraction experiment also proves the effectiveness of the method. Because the process can be repeated several times, the line-density of the grating can be further increased. The experimental results show that the grating period decreased from 10 μm to 5 μm after stretching and replication three times. Besides, the process is also applied to the fabrication of high-density grating. Although this process will lead to some loss of grating contour, compared with other grating fabricating technologies, this process has the advantages of low-cost, simplicity, and rapid fabrication. Therefore, it has good application value in the field of grating fabrication.

光栅在许多领域都发挥着重要作用，因此开发低成本、快速的光栅制造技术具有重要意义。本文首先通过COMSOL有限元仿真研究了PDMS的拉伸变形过程，仿真结果从理论上证明了拉伸可以有效提高PDMS光栅的线密度。然后，我们提出了一种基于 PDMS 拉伸和 PUA 复制来增加光栅线密度的新方法。讨论了延伸率与均匀区域、线密度增加率、槽深减少之间的关系。实验结果与仿真结果一致。光栅衍射实验也证明了该方法的有效性。因为这个过程可以重复多次，光栅的线密度可以进一步增加。实验结果表明，经过3次拉伸和复制后，光栅周期从10 μm降低到5 μm。此外，该工艺还应用于高密度光栅的制作。虽然该工艺会导致光栅轮廓的一些损失，但与其他光栅制造技术相比，该工艺具有成本低、简单、制造快速等优点。因此，它在光栅制造领域具有很好的应用价值。与其他光栅制造技术相比，该工艺具有成本低、简单、制造快速等优点。因此，它在光栅制造领域具有很好的应用价值。与其他光栅制造技术相比，该工艺具有成本低、简单、制造快速等优点。因此，它在光栅制造领域具有很好的应用价值。