A novel in situ diagnostic, scanning low-angle x-ray spectroscopy, has been introduced for compositional mapping of combinatorial thin film libraries. The technique uses high-energy electron beam-generated characteristic x rays from the films as they are deposited. The x-ray intensities are acquired dynamically, layer by layer at different film thicknesses, processed, and analyzed by Neocera-developed software using a unique algorithm. A fully automated four-axis mechanical stage facilitates data acquisition from a 2-in. diameter wafer providing a comprehensive compositional map across the wafer. A ternary materials library of Zn-Ti-Cr oxide has been deposited by continuous composition spread pulsed laser deposition to demonstrate the novel application of scanning low-angle x-ray spectroscopy for compositional mapping in situ. This in situ feedback on composition across the wafer significantly enhances the capability of any physical vapor deposition technique used for depositing combinatorial libraries, by providing compositional feedback during growth as well as the ability to monitor and control deposition processes for composition optimizations.

中文翻译：

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通过扫描低角 X 射线光谱法对组合材料库进行原位成分映射

原地小说诊断、扫描低角度 X 射线光谱已被引入用于组合薄膜库的成分映射。该技术在薄膜沉积时使用高能电子束产生的特征 X 射线。通过 Neocera 开发的软件使用独特的算法逐层动态获取不同薄膜厚度的 X 射线强度，进行处理和分析。全自动四轴机械载物台有助于从 2 英寸中采集数据。直径晶圆提供了整个晶圆的综合成分图。通过连续成分扩展脉冲激光沉积沉积了 Zn-Ti-Cr 氧化物的三元材料库，以展示扫描低角度 X 射线光谱在原位成分映射中的新应用. 通过在生长期间提供成分反馈以及监测和控制沉积过程以优化成分的能力，这种对整个晶片的成分的原位反馈显着增强了用于沉积组合库的任何物理气相沉积技术的能力。