Transmission electron microscopy has become a major characterization tool with an ever increasing variety of methods being applied in a wide range of scientific fields. However, the probably most famous pitfall in related workflows is the preparation of high-quality electron-transparent lamellae enabling for extraction of valuable information. Particularly in the field of solid state physics and materials science, it often required to study the surface of a macroscopic specimen with plan-view orientation. Nevertheless, despite tremendous advances in instrumentation, i.e. focused ion beam, the yield of existing plan-view lamellae preparation techniques is relatively low compared to cross-sectional extraction methods. Furthermore, techniques relying on mechanical treatments, i.e. conventional preparation, compromise site-specifity. In this paper, we demonstrate that by combining a mechanical grinding step prior to backside lift-out in the focused ion beam plan-view lamellae preparation becomes increasingly easy. The suggested strategy combines site-specifity with micrometer precision as well as possible investigation of pristine surfaces with a field of view of several hundred square micrometers.

透射电子显微镜已经成为一种主要的表征工具，越来越多的方法被应用于广泛的科学领域。然而，相关工作流程中最著名的陷阱可能是高质量电子透明薄片的制备，从而能够提取有价值的信息。特别是在固态物理和材料科学领域，经常需要研究具有平面视图取向的宏观样品的表面。然而，尽管仪器（即聚焦离子束）取得了巨大进步，但与横截面提取方法相比，现有平面视图薄片制备技术的产率相对较低。此外，依赖机械处理的技术，即常规制备，会损害部位特异性。在本文中，我们证明，通过在聚焦离子束平面视图薄片制备中背面提升之前结合机械研磨步骤变得越来越容易。建议的策略将站点特异性与微米精度以及对原始表面的可能调查与数百平方微米的视野相结合。