Low temperature co-fired ceramics (LTCC) technology-based micro-hotplates are of immense interest owing to their ruggedness, high temperature stability and reliability. The purpose of this paper is to study the role of thermal mass of LTCC-based micro-hotplates on the power consumption and temperature for gas-sensing applications.,The LTCC micro-hotplates with different thicknesses are designed and fabricated. The role of thermal mass on power consumption and temperature of these hotplates are simulated and experimentally studied. Also, a comparison study on the performance of LTCC and alumina-based hotplates of equivalent thickness is done. A thick film-sensing layer of tin oxide is coated on LTCC micro-hotplate and demonstrated for the sensing of commercial liquefied petroleum gas.,It is found from both simulation and experimental studies that the power consumption of LTCC hotplates was decreasing with the decrease in thermal mass to attain the same temperature. Also, the LTCC hotplates are less power-consuming than alumina-based one, owing to their superior thermal characteristics (low thermal conductivity, 3.3 W/ [m-K]).,This study will be beneficial for designing hotplates based on LTCC technology with low power consumption and better stability for gas-sensing applications.

中文翻译：

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用于气体传感应用的 LTCC 微型加热板的设计、制造和表征

基于低温共烧陶瓷 (LTCC) 技术的微型电炉因其坚固性、高温稳定性和可靠性而备受关注。本文的目的是研究基于 LTCC 的微型加热板的热质量对气体传感应用的功耗和温度的影响。设计并制造了不同厚度的 LTCC 微型加热板。热质量对这些电炉的功耗和温度的作用进行了模拟和实验研究。此外，还对等效厚度的 LTCC 和氧化铝基热板的性能进行了比较研究。LTCC 微热板上涂有一层厚厚的氧化锡薄膜感应层，并被证明可用于感应商业液化石油气。从模拟和实验研究中发现，LTCC 加热板的功耗随着热质量的减少而降低，以达到相同的温度。此外，LTCC 加热板的功耗低于氧化铝基加热板，因为它们具有优异的热特性（低热导率，3.3 W/[mK]）。这项研究将有利于设计基于 LTCC 技术的加热板，具有低功耗和更好的气体传感应用稳定性。