Functional nanomaterials possess exceptional mechanical, electrical, and optical properties which have significantly benefited their diverse applications to a variety of scientific and engineering problems. In order to fully understand their characteristics and further guide their synthesis and device application, the multiphysical properties of these nanomaterials need to be characterized accurately and efficiently. Among various experimental tools for nanomaterial characterization, scanning electron microscopy- (SEM-) based platforms provide merits of high imaging resolution, accuracy and stability, well-controlled testing conditions, and the compatibility with other high-resolution material characterization techniques (e.g., atomic force microscopy), thus, various SEM-enabled techniques have been well developed for characterizing the multiphysical properties of nanomaterials. In this review, we summarize existing SEM-based platforms for nanomaterial multiphysical (mechanical, electrical, and electromechanical) in situ characterization, outline critical experimental challenges for nanomaterial optical characterization in SEM, and discuss potential demands of the SEM-based platforms to characterizing multiphysical properties of the nanomaterials.

中文翻译：

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基于SEM的纳米材料原位多物理表征的最新进展


功能纳米材料具有优异的机械、电学和光学特性，这使其在解决各种科学和工程问题上的多样化应用显着受益。为了充分了解它们的特性并进一步指导其合成和器件应用，需要准确有效地表征这些纳米材料的多物理性质。在用于纳米材料表征的各种实验工具中，基于扫描电子显微镜（SEM）的平台具有高成像分辨率、准确性和稳定性、良好控制的测试条件以及与其他高分辨率材料表征技术（例如原子能表征技术）的兼容性等优点。因此，各种支持 SEM 的技术已经得到很好的发展，用于表征纳米材料的多物理性质。在这篇综述中，我们总结了现有的基于 SEM 的纳米材料多物理（机械、电气和机电）原位表征平台，概述了 SEM 中纳米材料光学表征的关键实验挑战，并讨论了基于 SEM 的平台表征多物理的潜在需求。纳米材料的特性。