The existing MEMS bionic vector hydrophone has the problems of low-sensitivity and narrow-working band, and the sensitivity and working bandwidth cannot be improved simultaneously by changing the single microstructural parameter. In this paper, the MEMS bionic vector hydrophone microstructural parameters (length, width and height of cantilever, side length of the center block, height and radius of the rigid cylinder) have been optimized simultaneously to obtain a higher sensitivity at the almost same working bandwidth. Firstly, through the mechanical analysis of the microstructure, the objective function and feasible region are established to optimize the parameters of the microstructure, and a set of optimized parameters is obtained. Secondly, the optimized structure is verified by ANSYS simulation, and then, the optimized four-beam structure is fabricated by the MEMS manufacturing technology. Finally, these two kinds of hydrophones (the previous one and the optimized one) are produced, and their performance tests are carried out. The testing results show that the performances of the optimized hydrophone have been greatly improved, exhibiting a receiving sensitivity of −181.2 dB@1 kHz (increasing by 6.5 dB, 0 dB reference 1 V/μ Pa), the frequency response ranging from 20 Hz to 1 kHz which is the same working bandwidth as before, and a good dipole directivity. The optimization researches in this paper provide a method and idea for the performance improvement of the following MEMS vector hydrophone.

中文翻译：

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MEMS仿生矢量水听器“圆柱四梁”显微结构改进研究

现有的MEMS仿生矢量水听器存在灵敏度低、工作频带窄的问题，不能通过改变单个微观结构参数同时提高灵敏度和工作带宽。本文同时优化MEMS仿生矢量水听器微结构参数（悬臂长宽高，中心块边长，刚性圆柱体高和半径），在几乎相同的工作带宽下获得更高的灵敏度. 首先，通过对显微组织的力学分析，建立目标函数和可行域对显微组织参数进行优化，得到一组优化参数。其次，通过ANSYS仿真对优化后的结构进行验证，然后，优化后的四梁结构采用MEMS制造技术制造。最后制作了这两种水听器（前一种和优化后的一种），并对其进行了性能测试。测试结果表明，优化后的水听器性能有了很大的提升，接收灵敏度达到-181.2 dB@1 kHz（增加6.5 dB，0 dB参考1 V/μ  Pa)，频率响应范围为 20 Hz 至 1 kHz，工作带宽与以前相同，偶极子方向性良好。本文的优化研究为后续MEMS矢量水听器的性能提升提供了方法和思路。