To explore the thermal effect of an electron beam irradiation during a scanning electron microscope (SEM) imaging process, a Monte Carlo (MC) method has been used to calculate the spatial distributions of local temperature rise in a spherical gold (Au) nanoparticle (i.e. Au Nano sphere (Au-NS)). The influencesofthe size of the nanoparticle, incident angle of the primary electron (PE) beam, PE energy and the PE beam size on the heat generation were systematically investigated. First of all, this work verified that Au-NSs with various sizes present different heat capacities under the same condition of the electron irradiation. The smaller the sphere, the less heat is accumulated. Besides, the heat in the periphery of a relatively large Au-NS is less than that inside. As the incident angle increases, the distribution regions of the temperature rise gradually expand from the contact surface deep into the interior and its amount rises proportionately. This rule is the same for an Au-NS with the diameter of 40 nm under various PE energies, but is quite opposite for the case of an Au-NS with the diameter of 5 nm. This study next presents that the PE beam size affects the heat generation in a spherical Au nanoparticle significantly. The distribution of temperature rise specifically shows a gradually reduced intensity towards the larger PE beam size. In addition, this work found that the total electron (TE) line-scan profile inversely relates the temperature contour map. The underlying mechanisms of these results were explained in detail primarily with the analysis of the trajectory of electrons as well as the interaction of electron-solid. This work, on the one side, greatly benefits the study of the relationship between the sample structures and the local thermal effect under the electron irradiation. On the other side, this work provides a further understanding and elucidation of the mechanism of electron-beam-induced deposition, compared to those earlier reports only focusing on plane bulks. It is believed that the proceeding of the semiconductor industry would be significantly promoted by this study.

为了探索在扫描电子显微镜 (SEM) 成像过程中电子束照射的热效应，蒙特卡罗 (MC) 方法已被用于计算球形金 (Au) 纳米颗粒中局部温度升高的空间分布（即金纳米球（Au-NS））。系统地研究了纳米粒子的尺寸、初级电子(PE)束的入射角、PE能量和PE束尺寸对发热的影响。首先，这项工作验证了不同尺寸的Au-NSs在相同的电子辐照条件下表现出不同的热容量。球体越小，积聚的热量就越少。此外，较大的Au-NS外围的热量小于内部的热量。随着入射角的增加，温升分布区域从接触面向内部逐渐扩大，其量也成比例上升。这个规则对于直径为 40 nm 的 Au-NS 在各种 PE 能量下是相同的，但对于直径为 5 nm 的 Au-NS 的情况则完全相反。该研究接下来表明 PE 光束尺寸显着影响球形 Au 纳米颗粒中的热量产生。温升的分布特别显示出朝向较大 PE 光束尺寸逐渐降低的强度。此外，这项工作发现总电子 (TE) 线扫描轮廓与温度等高线图成反比。这些结果的基本机制主要通过对电子轨迹的分析以及电子-固体的相互作用进行了详细解释。这项工作一方面极大地有益于研究电子辐照下样品结构与局部热效应之间的关系。另一方面，与早期仅关注平面体的报道相比，这项工作提供了对电子束诱导沉积机制的进一步理解和阐明。相信这项研究将大大促进半导体产业的发展。