In this work, we propose a new optical measurement method and setup to investigate the dynamic behavior of a pneumatically driven diaphragm micropump in a microfluidic system. The presented method allows a contact-free spatially and temporally resolved determination of the membrane displacement. Hence, it enables to derive the volume flow rate, generated by the micropump. The method is based on the Lambert–Beer law, which describes the intensity weakening of light traveling through a medium with an absorbing substance. The fluorescence emission of a medium can thus be related to the light traveling length. The measurement method is used to deduce the flow rate profile generated by the micropump of the Lab-on-Chip system Vivalytic from Bosch Healthcare Solutions. We further quantify effects of fluidic components and system parameters on the transient flow rates. This allows the determination of maximum flow rates and pumping cycle durations as a basis for the implementation of fluidic processes on the system. The presented method requires neither additional, integrated sensor components nor a complex measurement setup. It can be implemented in any microfluidic system with membrane-based, optically accessible micropumps without major hardware modifications.

在这项工作中，我们提出了一种新的光学测量方法和装置，以研究微流体系统中气动隔膜微泵的动态行为。所提出的方法允许对膜位移进行无接触的空间和时间分辨测定。因此，它能够推导出由微型泵产生的体积流量。该方法基于朗伯-比尔定律，该定律描述了通过具有吸收物质的介质传播的光的强度减弱。因此，介质的荧光发射可以与光传播长度相关。该测量方法用于推导出由 Lab-on-Chip 系统Vivalytic的微型泵产生的流量曲线来自博世医疗保健解决方案。我们进一步量化了流体组件和系统参数对瞬态流速的影响。这允许确定最大流速和泵送循环持续时间，作为在系统上实施流体过程的基础。所提出的方法既不需要额外的集成传感器组件，也不需要复杂的测量设置。它可以在任何具有基于膜的光学可访问微泵的微流体系统中实现，而无需对硬件进行重大修改。