In this paper, we report an actuator with a magnet made of novel rare earth magnetic powder Sm-Fe-N with diameter of 2 m to 5 m. Micro magnets were fabricated by mixing the magnetic powder with wax at temperature of 90 C. Alignment of the easy axis process was employed to enhance the remanence of the micro magnets. A 8 T strong pulse magnetic field was utilized to magnetize the micro magnets. The properties of magnetic powder were revealed with vibrating sample magnetometer by measuring micro magnets with various magnetic powder weight loading percentages. In the best condition, the remanence reaches 0.9 T and the energy product reaches 70 kJ m⁻³. After that, the electromagnetic actuator was fabricated by embedding the magnetic powder in deep-reactive-ion-etched Si cavity with wax binder and parylene capping. The completed microelectromechanical system structure was mounted on a four-layer printed circuit board with embedded coils. Upon the application of a direct current for actuation, a displacement of 180 μm was obtained from a device volume of only 1.5 mm³ with a low actuation power consumption of 11.5 mW.

在本文中，我们报告了一种由直径为 2 的新型稀土磁粉 Sm-Fe-N 制成的磁体的致动器 米到 5 米。通过在 90 摄氏度的温度下将磁粉与蜡混合来制造微磁体。采用易轴对准过程来增强微磁体的剩磁。8 T 强脉冲磁场被用来磁化微型磁铁。用振动样品磁强计通过测量具有不同磁粉重量负载百分比的微磁体来揭示磁粉的特性。在最佳条件下，剩磁达到0.9 T，能量积达到70 kJ m ^-3. 之后，通过将磁粉嵌入具有蜡粘合剂和聚对二甲苯封盖的深度反应离子蚀刻硅腔中来制造电磁致动器。完成的微机电系统结构安装在带有嵌入式线圈的四层印刷电路板上。在施加直流驱动时，从仅 1.5 mm ³的器件体积中获得180 μm的位移，并且驱动功耗仅为11.5 mW。