The structure design of micro cantilever beams(MCBs), which has a significant effect on MCBs’ controllable actuation range, is usually restricted by the establishment of the inner electric circuit. This paper proposes the design of a micro electro-controllable twisting cantilever beam (METCB). The architecture and the fabrication diagram of the proposed METCB are presented before its features are theoretically and experimentally validated. In detail, the analytical validation includes a sequence of two models: electro-thermal and thermo-mechanical. Through these two models, the thermal distribution along the METCB and the deformation brought by the thermal distribution are investigated, respectively. On the basis of the design and equations, the METCB samples have been manufactured using a planar deposition technique with an e-beam evaporator. Two in-site experiments are then conducted to sequentially figure out the upper voltage limit of the inner electric circuit and the maximum temperature limit of the METCB. Finally, another experiment is carried out to explore the relation between the applied voltage and the relative twisting angle of the METCB sample. The theoretical prediction and the observed experiment result both prove the feasibility of the proposed METCB and its electro-controllable twisting ability.

微悬臂梁(MCBs)的结构设计对微悬臂梁的可控驱动范围有显着影响，通常受到内部电路建立的限制。本文提出了一种微电控扭转悬臂梁（METCB）的设计。所提出的 METCB 的架构和制造图在其特征得到理论和实验验证之前被介绍。详细地说，分析验证包括两个模型的序列：电热模型和热机械模型。通过这两个模型，分别研究了沿 METCB 的热分布和热分布带来的变形。在设计和方程的基础上，METCB 样品是使用平面沉积技术和电子束蒸发器制造的。然后进行两次现场实验，依次计算出内部电路的电压上限和 METCB 的最高温度限制。最后，进行了另一项实验，以探索外加电压与 METCB 样品的相对扭转角之间的关系。理论预测和观测实验结果均证明了所提出的 METCB 的可行性及其电控扭曲能力。