Vibration assisted machining is an advanced non-conventional precision machining technique aiming at improving the machining performance by superimposing a small amplitude, high-frequency vibration either on the tool or on the workpiece. This article presents the mechanical design, electromechanical simulation, and experimentation on the developed prototype of the flexural hinged micro XY stage for the vibration-assisted micro-milling system. The micro XY stage comprises three layers of flexural hinge structure surrounding the central parallel kinematic structure. The finite element analysis method is adopted to evaluate the static structural stiffness and harmonic behaviour. Two multilayer piezoelectric stack actuators drive the micro XY stage in X and Y directions. The experimental results show that the micro XY stage has a vibrating work area of 17.06 m 17.11 m with a hysteresis nonlinearity and cross-coupling displacements on both axes. Therefore, an electromechanical model is essential to compensate for the hysteresis behaviour and cross-coupling displacements. Open-loop tracking control experiments determine the accuracy of the developed electromechanical model. Implementing a combined hysteresis and cross-coupling displacement compensation approach into the electromechanical model resulted in an open-loop tracking error of 7% for the synchronised circular path and a maximum deviation of 0.6 m from the linear path.

振动辅助加工是一种先进的非常规精密加工技术，旨在通过在刀具或工件上叠加小振幅、高频振动来提高加工性能。本文介绍了用于振动辅助微铣削系统的弯曲铰接微型 XY 平台原型的机械设计、机电仿真和实验。微型 XY 平台包括三层弯曲铰链结构，围绕中央平行运动结构。采用有限元分析方法来评估静态结构刚度和谐波行为。两个多层压电堆栈致动器在X和Y 方向驱动微型 XY 平台方向。实验结果表明，微型XY平台的振动工作面积为17.06米 17.11 m 具有滞后非线性和两个轴上的交叉耦合位移。因此，机电模型对于补偿滞后行为和交叉耦合位移至关重要。开环跟踪控制实验确定了开发的机电模型的准确性。在机电模型中实施组合滞后和交叉耦合位移补偿方法导致同步圆形路径的开环跟踪误差为 7%，最大偏差为 0.6m 从线性路径。