In this paper, an analytical method of resonant frequency, tuning range, the effective relative dielectric constant, and characteristic impedance is proposed, which is for coplanar waveguide (CPW) resonator loaded by defected ground structure (DGS) and micro-electromechanical systems (MEMS) capacitors. The analytical solution is achieved by an employing equivalent method. The resonant frequency, tuning range, and effective relative dielectric constant are obtained by the analytical solution. For verifying the effectiveness of the proposed method, a CPW tunable bandstop filter (BSF) with DGS and MEMS capacitors is designed, simulated, and fabricated, results show good effectiveness of the proposed analysis method. By changing the height of the MEMS beam with the actuation voltage, the designed BSF can switch the center frequency among three states (i.e. 18.5 GHz, 18.2 GHz, 17.5 GHz, respectively), and fractional bandwidth is changed as well (i.e. 37.8%, 45.6%, 49.5%, respectively).

本文针对缺陷接地结构（DGS）和微机电系统（MEMS）加载的共面波导（CPW）谐振器，提出了谐振频率、调谐范围、有效相对介电常数和特征阻抗的分析方法。 ) 电容器。解析解是采用等效方法得到的。通过解析解得到谐振频率、调谐范围和有效相对介电常数。为了验证所提出方法的有效性，设计、仿真和制造了具有 DGS 和 MEMS 电容器的 CPW 可调谐带阻滤波器 (BSF)，结果表明所提出的分析方法具有良好的有效性。通过随驱动电压改变 MEMS 梁的高度，