One of the novel phenomena of Ar/O₂ inductively coupled plasma, the delta negative ions density profile is discovered by the fluid simulation at very low electronegativity. The anions delta is found to be formed by the collaboration of successive plasma transport phases. The plasma transport itself is affected by the delta, exhibiting many new phenomena. A new type of Helmholtz equation is devised to mathematically explain the delta forming mechanism. For revealing the physics behind, a revised spring oscillator dynamic equation has been constructed according to the Helmholtz equation, in a relevant paper [Zhao S X and Li J Z (2021) Chin. Phys. B 30 055202]. The investigation about the anions delta distribution is a nice prediction of new phenomenon in low temperature electronegative plasmas, waiting for the validation of related experiments.

_{Ar/O 2}电感耦合等离子体的新现象之一，δ负离子密度分布是通过流体模拟在非常低的电负性下发现的。发现阴离子δ是由连续的等离子体传输阶段的协作形成的。等离子体传输本身受到三角洲的影响，呈现出许多新现象。一种新型的亥姆霍兹方程被设计用来在数学上解释三角洲的形成机制。为了揭示背后的物理原理，在相关论文 [Zhao SX and Li JZ (2021) Chin. 物理。B 30055202]。阴离子δ分布的研究是对低温电负性等离子体新现象的一个很好的预测，有待相关实验的验证。