Recent progress in 3D printing has brought many interests in developing functional devices in various applications by enabling the exploration of complex 3D structures. This paper presents the first fully metal printed standalone 3D solenoid microinductors using a high-power laser with a biocompatible Ti-alloy. Fine powder-based 6AL-4V Eli Titanium was directly printed using an automated gantry laser system with 60 μm resolution to form the inductors without any substrate. A substrate-less 10-turn solenoid as a testbed was printed out and characterized, and additional designs of 20 and 40 turn inductors were further explored. The wire of the inductor was designed to have a 700-micron square cross-section and a winding gap of 300 microns. The successfully fabricated 10-turn titanium-alloy solenoid inductor showed an average inductance of 130 nH, a low-frequency resistance of 0.8 ohms at 0.3 MHz, and a quality factor of 10.5 at 30 MHz respectively. Additional electrodeposition of copper to the 10-turn inductor demonstrated process compatibility with the conventional micromachining process. The standalone inductor printing method saves a significant volume from where the conventional substrate dimensions often take more than the volume of the device. Also, the standalone inductor can directly be used as a sensor device. Examples of force-displacement sensing applications were presented using the 10-turn and 19-turn round edge solenoid inductors.

3D 打印的最新进展通过探索复杂的 3D 结构，使人们对开发各种应用中的功能设备产生了兴趣。本文展示了第一个全金属打印的独立 3D 螺线管微电感器，该微电感器使用具有生物相容性钛合金的高功率激光器。使用具有 60 μ的自动化龙门激光系统直接打印基于细粉的 6AL-4V Eli Titaniumm 分辨率以形成没有任何基板的电感器。作为测试台的无基板 10 匝螺线管被打印出来并进行了表征，并进一步探索了 20 匝和 40 匝电感器的其他设计。电感器的导线设计为具有 700 微米的方形横截面和 300 微米的绕组间隙。成功制造的 10 匝钛合金螺线管电感器的平均电感为 130 nH，0.3 MHz 时的低频电阻为 0.8 欧姆，30 MHz 时的品质因数为 10.5。额外的铜电沉积到 10 匝电感器证明了与传统微加工工艺的工艺兼容性。独立的感应器印刷方法节省了大量的体积，而传统的基板尺寸通常比设备的体积还要大。还，独立电感器可直接用作传感器设备。使用 10 匝和 19 匝圆边螺线管电感器展示了力-位移传感应用的示例。