In this work, a low-voltage driven non-resonant three degree-of-freedom (DOF) eyeball-like piezoelectric actuator is proposed. Elliptical motions on the driving feet are formed from the pushing and pulling actions of the flexible displacement amplification (FDA) mechanism in the piezoelectric actuator. There are three types of elliptical movements to drive the spherical rotor around three coordinate axes while driving the different groups of piezoelectric stacks. The principles of the three-DOF rotations are analysed by theoretical and simulation methods. Fabrication of a miniature piezoelectric prototype of 34mmנ34mmנ34mm is conducted. Under a driving voltage of 40 the maximum rotary velocities of the rotor around X, Y and Z axes reach to 62.5 r min⁻¹, 65 r min⁻¹ and 46 r min⁻¹ at 1.5 kHz. High resolutions around X and Y axes up to 2.5 and 5 are obtained. The remarkable comprehensive performances enable much potential applications of this three-DOF eyeball-like piezoelectric actuator in precision pointing, attitude adjustment and bionic eye positioning systems.

在这项工作中，提出了一种低压驱动的非谐振三自由度 (DOF) 眼球状压电致动器。驱动脚上的椭圆运动是由压电致动器中的柔性位移放大（FDA）机构的推拉动作形成的。在驱动不同组压电堆的同时，有三种类型的椭圆运动来驱动球形转子绕三个坐标轴。通过理论和仿真方法分析了三自由度旋转的原理。制造了 34mm 34mm 34mm 的微型压电原型。在 40的驱动电压下，转子绕 X、Y 和 Z 轴的最大转速达到 62.5 r min ^-1、65 r min ^-1和 46 r min ^-1在 1.5 kHz。获得了围绕 X 和 Y 轴高达 2.5和 5 的高分辨率。卓越的综合性能使这种三自由度眼球状压电执行器在精密指向、姿态调整和仿生眼定位系统中具有许多潜在的应用。