Photolithographically defined thin film Au dots were used as micro fiducial markers for digital image correlation (DIC), to enable two-dimensional strain measurement of 200 μm-thick LIGA (Lithographie, Galvanformung, Abformung) nickel alloys. Due to the sensitivity of electrodeposited films’ microstructure and properties on the processing conditions, characterization of LIGA mechanical properties continues to be necessary for microsystems commercialization. DIC offers advantages over laser-based strain measurement techniques but creating suitable speckle patterns on specimens with dimensions under a millimeter is challenging. The material surface roughness itself is often used as the speckle pattern, or micro- or nanoparticles are applied to the surface. But for materials with highly polished surfaces, such as commercial LIGA alloys, the surface roughness is not always suitable, while application of particles still poses technical challenges in uniformity and reproducibility. We fabricated freestanding tensile specimens, with gauge sections 700 μm wide 3 mm long 200 μm thick, from electrodeposited Ni-10% Co using a commercial LIGA process, and conducted microtensile tests at strain rate 0.001 s⁻¹. Designing and fabricating arrays of randomly oriented 1.5 μm-thick Au dots on the specimens provided a suitable way to obtain full-field surface strains over the entire gauge lengths and was reproducible from one specimen to another. Microfabricated fiducial markers therefore can be a useful surface-preparation approach for investigating micromechanical behavior, particularly plasticity and fracture, of LIGA films using DIC.

光刻定义的薄膜 Au 点用作数字图像相关 (DIC) 的微基准标记，以实现 200 μ的二维应变测量m 厚 LIGA（光刻、Galvanformung、Abformung）镍合金。由于电沉积薄膜的微观结构和性能对加工条件的敏感性，LIGA 机械性能的表征对于微系统商业化仍然是必要的。DIC 与基于激光的应变测量技术相比具有优势，但在尺寸小于一毫米的样本上创建合适的散斑图案具有挑战性。材料表面粗糙度本身通常用作散斑图案，或者将微米级或纳米级应用于表面。但对于表面高度抛光的材料，如商业 LIGA 合金，表面粗糙度并不总是合适的，而颗粒的应用在均匀性和再现性方面仍然存在技术挑战。μ m 宽 3 mm 长 200 μ m 厚，使用商业 LIGA 工艺从电沉积 Ni-10% Co 中提取，并在应变速率 0.001 s ^-1下进行微拉伸测试。在样本上设计和制造随机取向的 1.5 μ m 厚 Au 点阵列提供了一种在整个标距长度上获得全场表面应变的合适方法，并且可以从一个样本复制到另一个样本。因此，微加工基准标记可以成为一种有用的表面制备方法，用于研究使用 DIC 的 LIGA 薄膜的微观机械行为，特别是塑性和断裂。