The influence of charge trap states in the dielectric boundary material on capacitively coupled radio-frequency (RF) plasma discharge is investigated with theory and particle-in-cell/Monte Carlo collision simulation. It is found that the trap states of the wall material manipulated discharge properties mainly through the varying ion-induced secondary electron emission (SEE) coefficient in response to dynamic surface charges accumulated within the solid boundary. A comprehensive SEE model considering surface charging is established first, which incorporates the valence band electron distribution, electron trap density, and charge trapping through Auger neutralization and de-excitation. Theoretical analysis is carried out to reveal the effects of trap states on sheath solution, stability, plasma density and temperature, particle and power balance, etc. The theoretical work is supported by simulation results, showing the reduction of the mean RF sheath potential as charging-dependent emission coefficient increases. As the gas pressure increases, a shift of the maximum ionization rate from the bulk plasma center to the plasma-sheath interface is observed, which is also influenced by the trap states of the electrode material where the shift happens at a lower pressure with traps considered. In addition, charge traps are proven to be helpful for creating asymmetric plasma discharges with geometrically symmetric structures; such an effect is more pronounced in γ-mode discharges.

通过理论和细胞内粒子/蒙特卡罗碰撞模拟，研究了介电边界材料中的电荷陷阱状态对电容耦合射频 (RF) 等离子体放电的影响。发现壁材料的陷阱态主要通过响应于固体边界内累积的动态表面电荷而改变离子诱导二次电子发射 (SEE) 系数来操纵放电特性。首先建立考虑表面电荷的综合 SEE 模型，该模型结合了价带电子分布、电子陷阱密度以及通过俄歇中和和去激发进行的电荷俘获。进行理论分析以揭示陷阱状态对鞘液、稳定性、等离子体密度和温度、粒子和功率平衡的影响，等。理论工作得到了仿真结果的支持，表明随着与充电相关的发射系数的增加，平均射频鞘层电位降低。随着气压的增加，观察到最大电离率从体等离子体中心转移到等离子体鞘界面，这也受到电极材料陷阱状态的影响，其中转移发生在考虑陷阱的较低压力下. 此外，电荷陷阱被证明有助于产生几何对称结构的非对称等离子体放电；这种效果在 观察到最大电离率从体等离子体中心到等离子体鞘界面的偏移，这也受到电极材料的陷阱状态的影响，其中在考虑陷阱的情况下发生在较低压力下的偏移。此外，电荷陷阱被证明有助于产生几何对称结构的非对称等离子体放电；这种效果在 观察到最大电离率从体等离子体中心到等离子体鞘界面的偏移，这也受到电极材料的陷阱状态的影响，其中在考虑陷阱的情况下发生在较低压力下的偏移。此外，电荷陷阱被证明有助于产生几何对称结构的非对称等离子体放电；这种效果在γ-模式放电。