Binary systems (layers) and multicomponent layers with bilayer thicknesses varying from microns to a few nanometers are considered. A strong dependence of the microstructure formation on the deposition conditions (the magnitude of the bias potential, the flow of inert and reactive gases, the ion beam power (current density) supplied to the target) is found. General regularities in the change in the functional properties and structural state of the coatings are formulated. The conditions for the formation of a columnar structure and growth texture are noted; various mechanisms and their interpretation are proposed. The relationship among the size of nanograins, diffusion at the interphase boundary, and effects determining the physico-mechanical, tribological characteristics, as well as resistance to corrosion and oxidation, is shown.

考虑了具有从微米到几纳米不等的双层厚度的二元系统（层）和多组分层。发现微结构形成对沉积条件（偏置电位的大小、惰性和反应气体的流动、提供给靶的离子束功率（电流密度））有很强的依赖性。制定了涂层功能特性和结构状态变化的一般规律。记录柱状结构和生长纹理的形成条件；提出了各种机制及其解释。显示了纳米晶粒的尺寸、相界面处的扩散以及决定物理机械、摩擦学特性以及耐腐蚀和抗氧化性的影响之间的关系。