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Analysis of dissolution kinetics of narrow polydispersity poly(4-hydroxystyrene) in alkaline aqueous solution using machine learning
Japanese Journal of Applied Physics ( IF 1.5 ) Pub Date : 2021-05-28 , DOI: 10.35848/1347-4065/ac016d
Naoki Tanaka 1 , Kyoko Watanabe 1 , Kyoko Matsuoka 1 , Kazuki Azumagawa 1 , Takahiro Kozawa 1 , Takuya Ikeda 2 , Yoshitaka Komuro 2 , Daisuke Kawana 2
Affiliation  

Understanding the dissolution kinetics of resist materials is essential for their efficient development. In this study, we investigated the dissolution kinetics of poly(4-hydroxystyrene) (PHS) with a weight-average molecular weight (M w) of 8000–30 000 and a polydispersity index (M w /M n) of 1.07–1.20. The dissolution kinetics of PHS films was observed in tetramethylammonium hydroxide (TMAH) aqueous developers by a quartz crystal microbalance (QCM) method. The TMAH concentration was changed from 0 to 2.38wt%. The formation of a thick transient swelling layer at these M w /M n values was suppressed compared with that at M w /M n>2. QCM data were analyzed using the polynomial regression to clarify the effects of M w and M w /M n on the dissolution kinetics in a narrow polydispersity region. Both dissolving and swelling kinetics largely depended on M w/M n. M w had little effect in 2.38wt% TMAH developer; however, it had a large effect on the swelling when 2.38wt% TMAH developer was diluted.



中文翻译:

使用机器学习分析窄多分散性聚(4-羟基苯乙烯)在碱性水溶液中的溶解动力学

了解抗蚀剂材料的溶解动力学对其有效开发至关重要。在这项研究中,我们用其重均分子量(研究聚(4-羟基苯乙烯)(PHS)的溶解动力学中号 瓦特的8000-30 000)和多分散性指数(中号 瓦特 / M Ñ的1.07-1.20) . 通过石英晶体微量天平 (QCM) 方法在四甲基氢氧化铵 (TMAH) 水性显影剂中观察 PHS 薄膜的溶解动力学。TMAH 浓度从 0 变为 2.38wt%。厚的瞬时膨胀层中的这些地层中号 瓦特 / M Ñ值被抑制与在比较中号 瓦特 / M Ñ>2. 使用多项式回归分析 QCM 数据,以阐明M wM w /M n对狭窄多分散区域中溶出动力学的影响。溶解和溶胀动力学在很大程度上取决于M w / M nM w在 2.38wt% TMAH 显影剂中影响不大;然而,当稀释 2.38wt% TMAH 显影剂时,它对溶胀有很大影响。

更新日期:2021-05-28
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