In this paper, we develop a repeat positioning, scanning tunneling microscope (STM), whose core component is a new straight-push piezoelectric nanopositioner. The special rigid frame structure and straight-push stepping method of this nanopositioner ensure that there is no lateral deviation while it is stepping. It has a smaller volume and a lower driving voltage than that of traditional piezoelectric nanopositioners with the same load capacity. The test results show that its threshold voltage is only 4 V. Additionally, when the driving signal frequency is constant, its step size and the amplitude of the driving signal show a linear relationship. Moreover, when the driving signal amplitude is constant, the velocity and driving signal frequency of the nanopositioner also show a linear relationship. In addition, the small STM (diameter less than 10 mm, length less than 50 mm) designed on the basis of this nanopositioner can work at full low-voltage. The STM’s high-resolution images and repeatable positioning performance are demonstrated in detail in this article. When the STM moves back and forth along the Z direction at a millimeter-scale distance, its positioning deviation in the same area of the sample is less than 30 nm. The capacity of the STM is very important for tracking and observing the different characteristics of some samples in different test conditions and is also significant for applications such as multi-tip collaborative work.

在本文中，我们开发了一种重复定位、扫描隧道显微镜（STM），其核心部件是一种新型直推式压电纳米定位器。这种纳米定位器的特殊刚性框架结构和直推步进方式确保它在步进时没有横向偏差。与相同负载能力的传统压电纳米定位器相比，它具有更小的体积和更低的驱动电压。测试结果表明，其阈值电压仅为4 V。另外，当驱动信号频率恒定时，其步长与驱动信号幅度呈线性关系。此外，当驱动信号幅度恒定时，纳米定位器的速度和驱动信号频率也呈线性关系。此外，基于该纳米定位器设计的小型STM（直径小于10 mm，长度小于50 mm）可以在全低电压下工作。本文详细展示了STM的高分辨率图像和可重复定位性能。当 STM 沿线来回移动时Z方向在毫米级距离，其在样品相同区域内的定位偏差小于30 nm。STM的能力对于跟踪和观察不同测试条件下某些样品的不同特性非常重要，对于多尖端协同工作等应用也具有重要意义。