Abstract

This article discusses interaction between reagents and stainless steel substrate upon deposition of tantalum coating by reduction of tantalum bromide with cadmium. It has been established that, at deposition temperatures higher than 1000 K, iron and chromium in stainless steel will reduce tantalum pentabromide, transferring into the gas phase in the form of bromides. As a consequence, not only tantalum bromide is reduced on the substrate but also iron bromide, which leads to formation of sublayer containing iron in the coating. An increase in the surface area of stainless steel interacting with reagents leads to an increase in the content of iron bromide, and in this case, the coating is formed from the mixture of Ta + Fe₂Ta. In addition, chromium bromide is formed on the substrate, which is removed together with other reaction products, resulting in depletion of chromium in steel surface layers.

中文翻译：

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钽的化学气相沉积在不锈钢基板上形成的层组成分析

摘要

本文讨论了通过用镉还原溴化钽来沉积钽涂层时试剂与不锈钢基材之间的相互作用。已经确定，在高于 1000 K 的沉积温度下，不锈钢中的铁和铬会还原五溴化钽，以溴化物的形式转移到气相中。结果，不仅溴化钽在基材上被还原，而且溴化铁也被还原，这导致在涂层中形成含有铁的亚层。不锈钢与试剂相互作用的表面积增加导致溴化铁含量增加，在这种情况下，涂层由Ta + Fe ₂的混合物形成塔。此外，在基体上形成溴化铬，与其他反应产物一起被去除，导致钢表层铬的消耗。