We studied the influences of the number of sub-pulses within a burst on the surface morphology of Al thin films deposited by picosecond pulsed laser. It can be demonstrated that with an increasing number of sub-pulses within a burst, both the thin film morphology and the surface roughness are gradually improved. Several physical mechanisms are proposed to explain the reduction in the size of particulates inside and on the film surface. The burst mode not only alleviates the inherent particulates generation of ultra-short pulsed laser deposition also provides a higher degree of freedom in the tunability of the film surface.

中文翻译：

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在突发模式下使用皮秒脉冲激光沉积改善铝薄膜形态

我们研究了脉冲串内的子脉冲数对皮秒脉冲激光沉积的铝薄膜表面形貌的影响。可以证明，随着脉冲串内子脉冲数量的增加，薄膜形貌和表面粗糙度都逐渐改善。提出了几种物理机制来解释薄膜内部和表面上颗粒尺寸的减小。突发模式不仅减轻了超短脉冲激光沉积固有的微粒生成，还为薄膜表面的可调性提供了更高的自由度。