The surface layer obtained by ion-beam stirring of a thin carbon film deposited on titanium alloy VT6 is studied. The composition and the chemical condition of elements in the surface layer are determined. Formation of a disordered carbon structure in a thin surface layer (20 – 40 nm) and of titanium carbides in the transition layer is detected. A model of formation of structure in the specimens during irradiation is developed. It is shown that formation of a disordered carbon structure, of titanium carbides, and of dislocation substructures is responsible for elevation of the microhardness of the specimens after ion-beam stirring.

中文翻译：

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离子束搅拌下沉积碳膜钛合金VT6表层的研究

研究了通过离子束搅拌沉积在钛合金 VT6 上的薄碳膜获得的表面层。确定表层元素的组成和化学条件。检测到在薄表面层 (20 – 40 nm) 中形成无序碳结构和在过渡层中形成碳化钛。建立了辐照过程中试样中结构形成的模型。结果表明，无序碳结构、碳化钛和位错亚结构的形成是离子束搅拌后试样显微硬度升高的原因。