A piezoelectric disk gyroscope fabricated with a single-crystal lithium niobate (LN) wafer has been developed for inertial navigation systems for localization during automated driving. LN has a high electromechanical coupling coefficient and a resonator made of a low-cost single-crystal wafer shows a high quality factor, which is suitable for high-performance vibratory gyroscopes. In this study, its crystallographic anisotropies in both in elastic and piezoelectric properties were considered to realize mode matching in the two-wine-glass-mode vibration of a disk resonator. We chose a 155°-Y-cut LN wafer because we found that its elastic compliance is uniform in any in-plane direction. Its anisotropic piezoelectric properties were considered to optimize the electrode design to oscillate the wine-glass modes efficiently. A 25.8-mm-diameter, 330- $\mu \text{m}$ -thick disk resonator with 16 electrodes on each side was designed and fabricated by photolithography and grinding. The as-fabricated LN disk resonator was successfully oscillated in two wine-glass modes with a small frequency split of 0.7% at 95 kHz resonant frequency. Gyroscope operation was successful and the scale factor was $0.35~\mu \text{V}$ /°/s without any preamplifier. [2021-0022]

中文翻译：

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单晶铌酸锂制成的压电圆盘陀螺

用单晶铌酸锂 (LN) 晶片制造的压电圆盘陀螺已被开发用于惯性导航系统，用于自动驾驶期间的定位。LN具有较高的机电耦合系数，由低成本单晶晶片制成的谐振器具有较高的品质因数，适用于高性能振动陀螺仪。在这项研究中，它在弹性和压电特性方面的晶体学各向异性被认为是在圆盘谐振器的双酒杯模式振动中实现模式匹配。我们选择了 155°-Y 切割的 LN 晶片，因为我们发现它的弹性柔量在任何平面方向上都是均匀的。其各向异性压电特性被认为可以优化电极设计，以有效地振荡酒杯模式。一个 25.8 毫米直径，330 毫米 $\mu \text{m}$ -通过光刻和研磨设计和制造每侧具有 16 个电极的厚盘谐振器。制造的 LN 圆盘谐振器在两种酒杯模式下成功振荡，在 95 kHz 谐振频率下具有 0.7% 的小频率分裂。陀螺仪操作成功，比例因子为 $0.35~\mu \text{V}$ /°/s 没有任何前置放大器。[2021-0022]