This article presents an implantable low-power wireless integrated system for tactile sensing applications. The reported application-specified integrated circuit (ASIC) uses a low-loss magnetic human body communication channel for both wireless power and data transfer. The chip is hybrid-integrated with an in-house fabricated MEMS capacitive force sensor to form an implantable artificial mechanoreceptor. An on-chip correlated double sampling capacitance to time converter (CTC) consumes 750 nW from a 1.2-V on-chip regulated supply, achieving a 2.0-fF resolution for an input capacitance of 14 pF and a FoM of 49 fJ/c-s while occupying an area of only 0.04 mm2. The CTC has a time-multiplexed mode to interface with four input capacitors. Wireless power management feedback is used to ensure robust operation in the presence of hand gesture changes and process-voltage-temperature variations. The on-chip data transmitter can operate in ON-OFF keying (OOK) or frequency-shift keying modulation formats, where it consumes only 7.8 μW in the OOK mode. The 1.62-mm2 chip is fabricated in a standard 180-nm CMOS process and consumes 110.3 μW.

中文翻译：

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180 nm CMOS 无线人工机械感受器


本文介绍了一种用于触觉传感应用的植入式低功耗无线集成系统。所报道的专用集成电路（ASIC）使用低损耗磁性人体通信通道进行无线充电和数据传输。该芯片与内部制造的 MEMS 电容力传感器混合集成，形成可植入的人工机械感受器。片上相关双采样电容时间转换器 (CTC) 通过 1.2V 片上稳压电源消耗 750nW 的功率，在 14pF 的输入电容和 49fJ/cs 的 FoM 下实现 2.0fF 的分辨率，同时占地面积仅为0.04mm2。 CTC 具有时分复用模式，可与四个输入电容器连接。无线电源管理反馈用于确保在手势变化和过程电压温度变化的情况下稳健运行。片上数据发送器可以以开关键控 (OOK) 或频移键控调制格式运行，在 OOK 模式下功耗仅为 7.8 μW。 1.62 mm2 芯片采用标准 180 nm CMOS 工艺制造，功耗为 110.3 μW。