In this study, a modified cold grid cathode penning ion source is constructed and characterized; to obtain a high stream of nitrogen ions. The effect of four samarium cobalt permanent magnet rods on the output ion beam current is studied using argon gas. The output ion beam current at different pressures and grid cathode diameters are measured using nitrogen gas. It is found that at the optimum grid cathode diameter equal to 14 mm, pressure equal to 9 × 10^–4 mbar, and discharge current equal to 1.8 mA, a maximum output ion beam current is equal to 220 μA using nitrogen gas. Also, the output ion beam current is measured at different pressures and optimum grid cathode diameter using argon and hydrogen gases. The effect of applied negative extraction voltages on the extracted ion beam current at the optimum parameters was determined using argon, hydrogen, and nitrogen gases.

本研究构建并表征了一种改进的冷栅阴极 Penning 离子源；以获得大量的氮离子流。使用氩气研究了四个钐钴永磁棒对输出离子束电流的影响。使用氮气测量不同压力和栅极阴极直径下的输出离子束电流。发现在最佳栅极阴极直径等于 14 mm，压力等于 9 × 10 ^–4 mbar，放电电流等于 1.8 mA，使用氮气时最大输出离子束电流等于 220 μA。此外，使用氩气和氢气在不同压力和最佳栅极阴极直径下测量输出离子束电流。使用氩气、氢气和氮气确定在最佳参数下施加的负提取电压对提取离子束电流的影响。