Large-Scale Metasurfaces Based on Grayscale Nanosphere Lithography,ACS Photonics

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Large-Scale Metasurfaces Based on Grayscale Nanosphere Lithography
ACS Photonics ( IF 6.5 ) Pub Date : 2021-06-01 , DOI: 10.1021/acsphotonics.1c00424
Hanyu Zheng ₁ , You Zhou ₂ , Chibuzor Fabian Ugwu ₃ , Andrew Du ₃ , Ivan I. Kravchenko ₄ , Jason G. Valentine ₃

Affiliation

Metasurfaces, based on subwavelength structuring, provide a versatile platform for wavefront manipulation in an ultrathin form factor. The manufacturing of metasurfaces, however, generally requires fabrication techniques, such as electron-beam lithography, that are not scalable. One alternative is the use of ultraviolet steppers, but these require significant capital investment and there are challenges in handling the large mask sizes that metasurfaces demand due to the structuring density. In this paper, we propose and demonstrate a novel manufacturing method based on self-assembly of nanospheres in combination with grayscale lithography. This technique enables large-scale metasurfaces with nonperiodic phase profiles while being cost-effective. As a proof of concept, we demonstrate a series of large-scale (1 mm diameter) metalenses demonstrating diffraction-limited focusing as well as holograms. This approach could open new doors to cost-effective and large-scale fabrication of a wide range of metasurface-based optics.

中文翻译：

基于灰度纳米球光刻的大规模超表面

基于亚波长结构的超表面为超薄外形的波前操作提供了一个多功能平台。然而，超表面的制造通常需要不可扩展的制造技术，例如电子束光刻。一种替代方法是使用紫外线步进器，但这需要大量的资本投资，并且由于结构密度的原因，在处理超表面所需的大掩模尺寸方面存在挑战。在本文中，我们提出并展示了一种基于纳米球自组装结合灰度光刻的新型制造方法。这种技术能够实现具有非周期性相位分布的大规模超表面，同时具有成本效益。作为概念证明，我们展示了一系列大尺度（直径 1 毫米）超透镜，展示了衍射极限聚焦和全息图。这种方法可以为各种基于超表面的光学器件的成本效益和大规模制造打开新的大门。

更新日期：2021-06-17

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