Accurate temperature measurements can efficiently solve numerous critical problems and provide key information. Herein, a flexible micro-three-dimensional sensor, with a combination of platinum and indium oxide to form thermocouples, is designed and fabricated by a microfabrication process to achieve in situ real-time temperature measurements. The stability and reliability of the sensor are greatly improved by optimizing the process parameters, structural design, and preparation methods. A novel micro-three-dimensional structure with better malleability is designed, which also takes advantage of the fast response of a two-dimensional thin film. The as-obtained flexible temperature sensor with excellent stability and reliability is expected to greatly contribute to the development of essential components in various emerging research fields, including bio-robot and healthcare systems. The model of the application sensor in a mask is further proposed and designed to realize the collection of health information, reducing the number of deaths caused by the lack of timely detection and treatment of patients.

准确的温度测量可以有效地解决众多关键问题并提供关键信息。在此，通过微加工工艺设计和制造了一种柔性微型三维传感器，由铂和氧化铟组合形成热电偶，以实现原位实时温度测量。通过优化工艺参数、结构设计和制备方法，大大提高了传感器的稳定性和可靠性。设计了一种具有更好延展性的新型微三维结构，它也利用了二维薄膜的快速响应。所获得的具有优异稳定性和可靠性的柔性温度传感器有望极大地促进各种新兴研究领域的关键组件的开发，包括生物机器人和医疗保健系统。进一步提出并设计了口罩中应用传感器的模型，实现了健康信息的采集，减少了因患者得不到及时发现和治疗而导致的死亡人数。