We present the optical layout and actual design of a compact high-aperture referenceless point diffraction interferometer with a diffraction reference wave. The basic concept of this interferometer is based on a single-mode optical fibre with a subwave output aperture, which is used as a source of spherical reference waves. The interferometer is designed for high-precision measurements of the surface shape and aberrations of optical elements. It makes use of a diffraction reference wave and is developed for mass industrial applications. The proposed design does not require the involvement of special external conditions, and reduces the need for calibrated reference surfaces. We evaluate the performance of our interferometer for highprecision measurements and demonstrate its use by presenting results obtained from measuring the shapes of spherical references from various manufacturers and the aberration of a five lens objective.

我们展示了具有衍射参考波的紧凑型大口径无参考点衍射干涉仪的光学布局和实际设计。该干涉仪的基本概念基于具有亚波输出孔径的单模光纤，用作球面参考波源。该干涉仪专为高精度测量光学元件的表面形状和像差而设计。它利用衍射参考波，专为大规模工业应用而开发。建议的设计不需要涉及特殊的外部条件，并减少了对校准参考面的需求。