Vertically aligned zirconium dioxide (ZrO2) nanowire (NW) array based fast response ultraviolet (UV) detector has been fabricated upon ZrO2 thin film (TF) by glancing angle deposition (GLAD) technique. The detector shows ~1.4 fold lesser dark current and ~1.5 fold enhanced light current than the ZrO2 TF due to the formation of oxygen vacancies. Improved detector performances through ~1.8 fold high photosensitivity, low ideality, high barrier height and fast response (Tr = 0.26 sec and Tf = 0.25 sec) was also observed for ZrO2 TF/ZrO2 NW based device. Therefore, these improved optoelectronic performances will ensure that the vertically aligned ZrO2 TF/ZrO2 NW based device demonstrated good reliability in optoelectronic device applications.

中文翻译：

---

采用掠射角沉积垂直联合 ZrO2 纳米线阵列的快速响应紫外检测器


采用掠射角沉积 (GLAD) 技术在 ZrO2 薄膜 (TF) 上制造了基于垂直排列二氧化锆 (ZrO2) 纳米线 (NW) 阵列的快速响应紫外 (UV) 探测器。由于氧空位的形成，该探测器的暗电流比 ZrO2 TF 减少约 1.4 倍，光电流增强约 1.5 倍。基于 ZrO2 TF/ZrO2 NW 的器件还观察到通过约 1.8 倍的高光敏度、低理想度、高势垒高度和快速响应（Tr = 0.26 秒和 Tf = 0.25 秒）改进了探测器性能。因此，这些改进的光电性能将确保垂直排列的ZrO2 TF/ZrO2 NW基器件在光电器件应用中表现出良好的可靠性。