The results from studying extreme ultraviolet emission spectra of targets based on shock waves upon excitation by pulsed laser radiation are discussed in this work. A shock wave is formed during a head-on collision of supersonic gas jets formed by supersonic conical nozzles. For excitation, we used a Nd:YAG laser with λ = 1064 nm, τ = 5 ns and E_imp = 0.8 J. The investigated spectral range is 90–200 A. The emission spectra of Ar, Kr, N₂ and CO₂ are explored. The obtained emission spectra are decoded and the emitting ions determined. As a result, we are able to draw a conclusion regarding the applicability of these targets as sources of extreme ultraviolet radiation.

本文讨论了基于脉冲激光辐射激发的冲击波研究目标的极紫外发射光谱的结果。在由超音速锥形喷嘴形成的超音速气体射流正面碰撞期间形成冲击波。对于激发，我们使用了 Nd:YAG 激光器，λ = 1064 nm，τ = 5 ns，E _imp  = 0.8 J。研究的光谱范围为 90–200 A。Ar、Kr、N ₂和 CO ₂的发射光谱被探索。对获得的发射光谱进行解码并确定发射离子。因此，我们能够得出关于这些目标作为极紫外辐射源的适用性的结论。