Some piezoelectric materials, such as zinc oxide (ZnO), have not only piezoelectric property but also semiconductor characteristics. However, the semiconductor characteristics are omitted in the study of elastic surface waves propagation in the surface acoustic waves devices that composed of these materials with elastic materials. In this paper, analytical solutions for the Rayleigh waves in a piezoelectric semiconductor (PSC) thin film perfectly bonded to an elastic half-space are obtained. The general solution of each layer is derived by using wave-mode method. Making use of the boundary conditions on the top of the thin film and the interface conditions between the thin film and the half-space, the dispersion relations are given analytically. Numerical examples show the dispersion and attenuation curves of the Rayleigh waves in the ZnO PSC thin film/diamond elastic half-space with fixed thin-film thickness, steady-state carrier density and biasing electric field. Notably, the Rayleigh waves can propagate with a wave speed larger than the shear-wave speed in the elastic half-space, which is quite different from that in the corresponding elastic half-space covered with a piezoelectric thin film or elastic thin film. We then investigate the effect of steady-state carrier density, thin-film thickness, and biasing electric field on the maximum speed of the Rayleigh waves and the interaction of the first two modes in the ZnO PSC thin film/diamond elastic half-space, which could be very helpful as theoretical guidance for the design of the PSC surface acoustic wave devices.

一些压电材料，如氧化锌 (ZnO)，不仅具有压电特性，还具有半导体特性。然而，在研究由这些材料和弹性材料组成的表面声波器件中的弹性表面波传播时，半导体特性被忽略了。在本文中，获得了完美结合到弹性半空间的压电半导体 (PSC) 薄膜中瑞利波的解析解。每一层的通解都是用波模法推导出来的。利用薄膜顶部的边界条件和薄膜与半空间的界面条件，解析给出了色散关系。数值例子显示了具有固定薄膜厚度、稳态载流子密度和偏置电场的 ZnO PSC 薄膜/金刚石弹性半空间中瑞利波的色散和衰减曲线。值得注意的是，瑞利波在弹性半空间中可以以大于剪切波速度的波速传播，这与在相应的由压电薄膜或弹性薄膜覆盖的弹性半空间中的传播速度大不相同。然后，我们研究了稳态载流子密度、薄膜厚度和偏置电场对瑞利波最大速度的影响以及 ZnO PSC 薄膜/金刚石弹性半空间中前两种模式的相互作用，作为 PSC 表面声波器件设计的理论指导，这可能非常有帮助。