Abstract

The correlation of errors for various broadband optical monitoring strategies for controlling deposition of multilayer coatings, including strategies with replaceable monitoring chips, is investigated. It is shown that it is necessary to take into account the effect of error self-compensation when choosing a monitoring strategy. The results of this study can be used to select the most promising monitoring strategy for a given type of multilayer coatings.

中文翻译：

---

多层涂层沉积的宽带光监控策略选择

摘要

研究了用于控制多层涂层沉积的各种宽带光学监控策略（包括带有可更换监控芯片的策略）的误差之间的相关性。结果表明，在选择监控策略时有必要考虑误差自补偿的影响。这项研究的结果可用于为给定类型的多层涂层选择最有前途的监测策略。