We present a newly developed methodology using computer-readable fiducial markers to allow images from multiple imaging modalities to be registered automatically. This methodology makes it possible to correlate images from many surface imaging techniques to provide an unprecedented level of surface detail on a nanometre scale that no one technique can provide alone.

This methodology provides the capability to navigate to specific areas of interest when transferring samples from machine to machine seamlessly. Then taking data acquired from scanning electron microscope (SEM), secondary ion mass spectrometry (SIMS), x-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM) and optical inspection tools and combining all the data acquired to then generate a 3D data representative model of a surface.

我们提出了一种新开发的方法，使用计算机可读的基准标记来允许自动注册来自多种成像模式的图像。这种方法可以将来自许多表面成像技术的图像相关联，以提供前所未有的纳米级表面细节，这是任何一种技术都无法单独提供的。

这种方法提供了在机器之间无缝传输样品时导航到特定感兴趣区域的能力。然后获取从扫描电子显微镜 (SEM)、二次离子质谱仪 (SIMS)、X 射线光电子能谱 (XPS)、原子力显微镜 (AFM) 和光学检测工具中获取的数据，并结合所有获取的数据，然后生成 3D表面的数据代表模型。