The integrated THz pattern over any MMIC appears to be a good opportunity to enclose calibration kit suitable for accurate measurements. An original technology based on polymer has been developed. Sub-millimeter single-mode conductor-backed coplanar waveguides using benzocyclobutene polymer and interconnecting via between ground planes are processed and measured up to 760 GHz. The experimental performances show good agreement with analytical and numerical modeling. A two-tier Thru-Reflect-Line correction and a square root of Thru de-embedding are applied to extract the attenuation factor of about 3 dB/mm at 600 GHz, the relative phase velocity to light of about 0.716 and the characteristic impedance around 50 Ω. The fundamental propagating mode remains unique in this wide frequency range, enabling this technological to be integrated over existing circuit for THz applications. The loss performance of the coplanar waveguide ranges in the state-of-the-art opening the road for fully integrated THz circuits.

任何 MMIC 上的集成太赫兹模式似乎是一个很好的机会来封装适用于精确测量的校准套件。开发了基于聚合物的独创技术。使用苯并环丁烯聚合物和接地平面之间的互连通孔的亚毫米单模导体背衬共面波导在高达 760 GHz 的频率下进行处理和测量。实验性能与解析和数值模型显示出良好的一致性。应用两层直通反射线校正和直通去嵌入的平方根以提取 600 GHz 下约 3 dB/mm 的衰减因子、约 0.716 的光相对相速度和周围的特征阻抗50Ω。基本传播模式在这个宽频率范围内保持独特，使这项技术能够集成到现有的太赫兹应用电路上。共面波导的损耗性能处于最先进的水平，为完全集成的太赫兹电路开辟了道路。