An electrostatic bifurcation-based microcantilever sensor equipped with a tip plate is investigated for sensitivity. A closed-form expression for sensitivity of this type of sensors is approximated using the frequency-response equation of the cantilever. The expression relates the sensor sensitivity due to the added mass with its geometric and material properties. The formula shows that the sensitivity of the sensor is quadratically proportional to the quality factor. Further, the sensitivity is inversely proportional to the third power of the beam stiffness and the ninth power of the gap distance. This formulation unveils the factors influencing the sensitivity of this sensor class configuration and could serve as a guideline in optimizing the design of this type of sensors for enhanced performance.

研究了带有尖端板的基于静电分叉的微悬臂梁传感器的灵敏度。使用悬臂的频率响应方程式可以近似表示这种类型的传感器的灵敏度。该表达式将由于增加的质量而引起的传感器灵敏度与其几何和材料特性联系起来。该公式表明，传感器的灵敏度与品质因数成正比。此外，灵敏度与光束刚度的三次方和间隙距离的三次方成反比。该公式揭示了影响此类传感器配置灵敏度的因素，并可以作为优化此类传感器设计以提高性能的指南。