The outgassing rates of various ceramic materials were systematically investigated. This paper intercompares the most relevant ceramic material classes used in vacuum technology, namely, oxide (five different types investigated) and non-oxide based ceramics, including nitrides (four different types) and carbides (three different types). For this purpose, the Outgassing Measurement Apparatus, which uses the difference method, was applied. Besides time, also, temperature dependence of outgassing was studied to check whether a previous heat treatment of the ceramics is necessary. Additionally, the outgassing species were qualitatively determined by a quadrupole mass spectrometer. In total, relatively large differences were found between the investigated ceramic materials for their initial outgassing rates as well as for their behavior at elevated temperatures. All investigated types of carbide ceramics showed very low outgassing rates of less than 3 × 10⁻⁸ Pa m³/(s m²) after 100 h at room temperature, whereas rather high outgassing rates of about 10⁻⁵ Pa m³/(s m²) were found for magnesia as well as the tested nitride ceramic types. Thus, depending on the ceramic material, a heat treatment is strongly recommended before use in ultrahigh vacuum applications.

中文翻译：

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系统研究不同陶瓷材料的脱气行为

系统地研究了各种陶瓷材料的脱气率。本文对真空技术中最相关的陶瓷材料类别进行了比较，即氧化物（研究了五种不同类型）和非氧化物基陶瓷，包括氮化物（四种不同类型）和碳化物（三种不同类型）。为此，使用了采用差值法的除气测量设备。除了时间以外，还研究了除气的温度依赖性，以检查是否需要对陶瓷进行预先热处理。另外，通过四极质谱仪定性地确定除气种类。总共，对于所研究的陶瓷材料，其初始脱气速率以及在高温下的行为，发现相对较大的差异。所有研究类型的硬质合金都显示出非常低的除气率，小于3×10在室温下放置100 h后为⁻⁸  Pa m ³ /（s m ²），而镁和测试的氮化物陶瓷类型的除气率很高，约为10 ^-5  Pa m ³ /（s m ²）。因此，根据陶瓷材料的不同，强烈建议在用于超高真空应用之前进行热处理。