An ultrasonic vibration-assisted indentation system/method is proposed and developed to fabricate structured or textured surfaces more precisely and efficiently than the conventional micro-cutting process. Indenters made of single crystalline diamond (SCD) were fabricated by laser fabrication and polishing with diamond abrasives on a cast iron plate. In the experiments, the microarray molds of four-corner cone and semi-sphere shapes were generated precisely on the electroless Ni-P substrate with ultrasonic vibration-assisted indentation using the SCD indenters. From the indentation experiments, it is clear that the microtextured patterns were formed precisely and effectively by using the developed indentation system.

提出并开发了一种超声波振动辅助压痕系统/方法，以比传统的微切割工艺更精确、更有效地制造结构化或纹理化表面。由单晶金刚石 (SCD) 制成的压头是通过激光制造和在铸铁板上用金刚石磨料抛光制成的。在实验中，使用 SCD 压头通过超声振动辅助压痕在化学镀 Ni-P 基板上精确地生成了四角锥形和半球形状的微阵列模具。从压痕实验中可以明显看出，使用开发的压痕系统可以精确有效地形成微纹理图案。