We demonstrate a CMOS-foundry-based ${\rm{S}}{{\rm{i}}_3}{{\rm{N}}_4}$ photonic platform at blue and violet wavelengths that exhibits record-high intrinsic Qs of around 6 M at 453 nm and ${\lt}{{1}}\;{\rm{dB/cm}}$ waveguide propagation loss of around 405 nm.

中文翻译：

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基于CMOS铸造的蓝色和紫色光子

我们演示了基于CMOS铸造的$ {\ rm {S}} {{\ rm {i}} _ 3} {{\ rm {N}} _ 4} $在蓝色和紫色波长的光子平台，该平台显示出创纪录的本征在453 nm处的Qs约为6 M，并且$ {\ lt} {{1}} \; {\ rm {dB / cm}} $波导的传播损耗约为405 nm。